Oxford Instruments and Bluefors: a statement
Oxford Instruments and Bluefors have amicably resolved their on-going disputes under mutually acceptable terms and conditions, including financial payments to Oxford Instruments, arising…
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DEPOSITION TOOLSPlasma Enhanced Chemical Vapour Deposition (PECVD)Chemical Vapour Deposition (CVD)Inductively Coupled Plasma Chemical Vapour Deposition (ICPCVD)Atomic Layer Deposition (ALD)Ion Beam Deposition (IBD)ETCH TOOLSInductively Coupled Plasma Etching (ICP RIE)Reactive Ion Etching (RIE)Deep Silicon Etching (DSiE)Atomic Layer Etching (ALE)Ion Beam Etching (IBE)
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