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DEPOSITION TOOLSPlasma Enhanced Chemical Vapour Deposition (PECVD)Inductively Coupled Plasma Chemical Vapour Deposition (ICPCVD)Atomic Layer Deposition (ALD)Ion Beam Deposition (IBD)ETCH TOOLSInductively Coupled Plasma Etching (ICP RIE)Reactive Ion Etching (RIE)Deep Silicon Etching (DSiE)Atomic Layer Etching (ALE)Ion Beam Etching (IBE)
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Figure 1. Indentation property maps of the annealed 316L stainless steel sample with the corresponding orientation map from EBSD and a BSE micrograph of the indentation grid.
Figure 3. 2D histogram of indentation results from 316L stainless steel, and 2D scatter plot of results with IPF color labeling. This shows trends in hardness and reduced modulus with crystallographic orientation.