Transmission Electron Microscopy (TEM) Sample Preparation

Transmission Electron Microscopy (TEM) utilizes electron transparent samples to perform nanoscale analysis down to the atomic level. To achieve this samples must be prepared and thinned so their thickness is uniform across the area of interest, less than 100 nm and free from contamination.

In this tutorial, we discuss the different approaches to TEM sample preparation. We highlight the advantages and disadvantages of the most common preparation techniques, providing useful hints and tips along the way. Finally, this tutorial details a standard TEM lift out approach using the OmniProbe.

You will learn:

  • Why TEM requires thin samples and how they are prepared
  • About a range of TEM sample preparation techniques and how they can be applied to different sample types
  • How to prepare a TEM lift-out using a FIB-SEM
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16 Minutes






Dr Sam Marks - Oxford Instruments
Key Account Manager

Dr Sam Marks graduated with an MPhys in Physics from the University of York, and a PhD in electron microscopy from the Universi...


AZtecTEM is a unique system approach to the characterisation of materials at the nanoscale. Building on over 30 years Oxford Instruments’ experience in TEM technologies, AZtec is everything you should expect of a next-generation EDS system for TEM.