Optimise Compositional Analysis on the SEM with Combined EDS and WDS Automation and Mapping

Energy Dispersive Spectrometry (EDS/EDX) and Wavelength Dispersive Spectrometry (WDS/WDX) are two techniques that utilise the X-ray signal generated when a sample is bombarded with a beam of high energy electrons (e.g. in a Scanning Electron Microscope (SEM)). This webinar discusses the advantages and limitations of both techniques and showcases how our latest developments in the AZtecWave software enable EDS and WDS data to be optimally acquired and successfully combined.

Elemental mapping with SEM-EDS is a fast and effective tool for investigating compositional variations across the surface of solid samples.

However, EDS mapping struggles when elements are present in trace concentrations or affected by X-ray peak overlaps in the EDS spectrum. This is where elemental mapping using a fully focussing, Rowland circle WD spectrometer comes in. Due to the spectral resolution of WDS being ~10x better than EDS, WDS can resolve and produce accurate elemental maps for trace elements those impacted by peak overlaps. Combining both EDS and WDS elemental mapping brings together the advantages of both techniques – speed and sensitivity. This is illustrated with several examples, including the analysis of a steel sample containing rare earth element (REE) inclusions.

As WDS is inherently slower than EDS, for efficient use of both instrument and time, it is desirable to be able to automate data collection. Multiple, individual stage positions, and lines of points can now be saved and subsequently run automatically in AZtecWave. Automated data acquisition from lines of points is particularly useful for investigating diffusion profiles, and this is demonstrated using datasets collected from volcanic minerals.

In this webinar, you will learn about how:

  • Elemental mapping with WDS can be used to accurately determine spatial variations in trace elements or those effected by X-ray peak overlaps in the EDS spectrum
  • The automation of quantitative WDS and/or EDS analysis from lines of points can be used to investigate diffusion profiles
  • To work effectively by automating the collection of WDS and/or EDS data from individual points or lines of points
Watch on demand
Watch on demand
On Demand

On Demand


1 hour






Dr Rosie Jones - Oxford Instruments
WDS Product Manager

Dr Rosie Jones graduated with a BSc and MSc in GeoSciences and Geochemistry from the University of Leeds, and a PhD in Geology ...

Dr Lucia Spasevski - Oxford Instruments
Product Manager

Dr Lucia Spasevski graduated with a BSc and MSc in Chemistry. She started her career as a Sales and Application specialist for ...


AZtecWave combines the unique power of WDS to resolve X-ray peaks and quantify minor and trace elements with the speed and flexibility of EDS.