Introduction to Electron Backscatter Diffraction (EBSD)

Electron Backscatter Diffraction (EBSD) is a scanning electron microscope (SEM) based diffraction technique, which gives information about the microstructure in a sample.

In EBSD, a stationary electron beam interacts with a tilted crystalline sample and the diffracted electrons form a pattern that can be detected with a fluorescent screen. The diffraction pattern is characteristic of the crystal structure and orientation in the sample region, where it was generated. Hence the diffraction pattern can be used to determine the crystal orientation, discriminate between phases with different crystal structures, characterise grain boundaries and provide information about the local crystalline perfection.

EBSD has become a well-established accessory for the SEM, which is used to provide crystallographic information routinely. As a result, EBSD is now being applied in numerous different application areas to assist in materials characterisation.

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In this tutorial, we will explain how EBSD works, the type of information the technique can provide, and how the recent software and hardware developments can be of benefit to your applications.

You will learn:

  • What EBSD is and how an EBSD system works
  • Latest developments related to EBSD detector hardware and software
  • How EBSD can help you with your applications
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20 Minutes






Kim Larsen - Oxford Instruments
Senior Product Scientist

Kim Larsen joined HKL Technology A/S in January 2004. The company was acquired by Oxford Instruments in the following year. Thr...


Discover the power of Oxford Instruments' AZtecCrystal software, which provides all the necessary tools to process and interrogate your EBSD data and to solve your materials problems.