Part 2: An Overview of WDS and EDS Point Automation in Aztec

Elemental analysis on the Scanning Electron Microscope (SEM) typically takes longer with Wavelength Dispersive Spectrometry (WDS / WDX) in comparison to Energy Dispersive Spectrometry (EDS / EDX). Therefore, for efficient use of both the SEM and the analysts time, it is desirable to be able to automate data collection. As such we have introduced Point Automaton in the AZtec software.

AZtec Point Automation enables both WDS and/or EDS data to be automatically acquired from defined stage positions whilst the SEM is left unattended. There are two options for setting up the stage positions, or points, for analysis - either as individual stage positions, or lines of points defined by a start and end stage position. Data acquisition from lines of points is particularly useful for investigating diffusion profiles and compositional changes around phase boundaries.

In this tutorial I will demonstrate how to set up and automatically acquire both WDS and EDS data from individual points and lines of points, on a sample, in AZtec.

You will learn:

• The advantages of performing automated WDS (and EDS) acquisition
• How to set up automated acquisition of WDS and/or EDS data from individual points and lines of points in AZtec
• Tip and tricks on how to acquire accurate quantitative elemental data when using point automation