22 May 2026
Oxford Instruments to Supply Atomic Layer Etch Equipment to Rigetti Computing to Expand Advanced Quantum Fabrication Capabilities
Oxford Instruments is pleased to announce that Rigetti Computing has purchased a PlasmaPro 100 CobraTM atomic layer etch (ALE) system, for dedicated fabrication of quantum devices, further enhancing its recently expanded quantum foundry.
Rigetti Computing, a pioneer in the quantum computing industry, launched the world’s first dedicated quantum foundry, Fab-1, in 2017, addressing the challenges of relying on shared fabrication tools and facilities. These in-house chip capabilities enable high-volume qubit fabrication with predictable performance, quality and faster timelines.
Fab-1, Fremont, CA. Image curtesy of Rigetti Computing
The strategic investment by Rigetti to expand the advanced manufacturing capability supports its objective to scale to extremely high qubit count systems required for error correction and fault-tolerant quantum computing.
“Our in-house foundry allows us to innovate rapidly, moving from prototypes to production, in weeks, rather than months. The addition of Oxford Instruments’ ALE system will support our ambitious roadmap and performance goals, and further bolsters Fab-1 as a critical asset for advancing our superconducting qubit technology,” says Dr. Subodh Kulkarni, Rigetti CEO.
“Oxford Instruments ALE technology delivers a smooth low damage etch process for next-generation quantum devices, making the PlasmaPro100 Cobra an excellent addition to the quantum fabrication facility in Fab-1. We are delighted to partner with Rigetti and work with them to achieve their ambitious goals.” Commented Matt Kelly, Managing Director, Oxford Instruments Plasma Technology. “The quantum foundry model, that Rigetti has pioneered, demonstrates the value of investing in in-house qubit fabrication capability, when transitioning to quality and performance at scale.”
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