19 Dec
Oxford Instruments plc : Acquistition of Asylum Research Corp. has been completed.
The acquisition of Asylum Research Corporation, announced on 17 December 2012 has been completed.
Products
DEPOSITION TOOLSPlasma Enhanced Chemical Vapour Deposition (PECVD)Chemical Vapour Deposition (CVD)Inductively Coupled Plasma Chemical Vapour Deposition (ICPCVD)Atomic Layer Deposition (ALD)Ion Beam Deposition (IBD)ETCH TOOLSInductively Coupled Plasma Etching (ICP RIE)Reactive Ion Etching (RIE)Deep Silicon Etching (DSiE)Atomic Layer Etching (ALE)Ion Beam Etching (IBE)
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