Oxford Instruments Launches Innovation Centre
Oxford Instruments has brought together the best of its analytical innovations…
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DEPOSITION TOOLSPlasma Enhanced Chemical Vapour Deposition (PECVD)Chemical Vapour Deposition (CVD)Inductively Coupled Plasma Chemical Vapour Deposition (ICPCVD)Atomic Layer Deposition (ALD)Ion Beam Deposition (IBD)ETCH TOOLSInductively Coupled Plasma Etching (ICP RIE)Reactive Ion Etching (RIE)Deep Silicon Etching (DSiE)Atomic Layer Etching (ALE)Ion Beam Etching (IBE)
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