20 June 2025
Oxford Instruments and Eindhoven University of Technology formalise and continue 20-year partnership
Solidify our shared commitment to pushing the boundaries of plasma and materials processing for the technologies of tomorrow.
Oxford Instruments and Eindhoven University of Technology (TU/e) announce today the signing of a Memorandum of Understanding between the two organisations. The document reflects a shared vision to continue to work together, to renew and to strengthen the collaboration that has already been in place for 20 years.
Klaas Wisniewski, Strategic Business Development Director at Oxford Instruments Plasma Technology (left) and Prof.dr.ir. Erwin Kessels, Scientific director of the NanoLab@TU/e cleanroom (right), signing a Memorandum of Understanding.
Since 2005, the partnership between Oxford Instruments and TU/e has spanned multiple generations of collaboration on the development of several plasma-enhanced atomic layer deposition (PEALD) systems, with the OpAL, and the FlexAL, and now both the PlasmaPro ASPTM and AtomfabTM. These latter systems share the same patented plasma source design DNA, representing innovative plasma source technology in PEALD. While the PlasmaPro ASP is tailored to address key challenges in quantum technology, applied research, low volume manufacturing and pilot production, the Atomfab is optimised for high volume production in markets such as GaN and SiC power electronics.
"Today, atomic scale processing is enabling new device architectures and next generation applications across the semiconductor landscape. We are very excited to strengthen our collaboration with Professor Erwin Kessels, and the team at TU/e, and look forward to working together to execute our strategic objectives whilst investing substantially into this partnership." Klaas Wisniewski, Strategic Business Development Director, Oxford Instruments Plasma Technology. “The partnership between Oxford Instruments and TU/e underscores the immense value of long-term development collaborations and this MoU will create the foundation to further accelerate innovation, drive joint research initiatives, and solidify our shared commitment to pushing the boundaries of plasma and materials processing for the technologies of tomorrow. As we continue to work closely with TU/e, we are confident that this partnership will yield even greater breakthroughs for applied research and production applications.”
“This long-standing collaboration between Plasma Technology and TU/e has been incredibly fruitful — it has brought innovative ALD equipment to the market, enabled new process breakthroughs, and contributed to the training of a new generation of researchers. It has also played a pivotal role in shaping my own career. I’m excited about continuing and further intensifying this partnership in the years to come.” Prof.dr.ir. Erwin Kessels. Professor in Applied Physics at TU/e and Scientific director of the NanoLab@TU/e cleanroom.