Products
DEPOSITION TOOLSPlasma Enhanced Chemical Vapour Deposition (PECVD)Inductively Coupled Plasma Chemical Vapour Deposition (ICPCVD)Atomic Layer Deposition (ALD)Ion Beam Deposition (IBD)ETCH TOOLSInductively Coupled Plasma Etching (ICP RIE)Reactive Ion Etching (RIE)Deep Silicon Etching (DSiE)Atomic Layer Etching (ALE)Ion Beam Etching (IBE)
Learning
Schematic representation of the wavelength and polarisation-dependent reflectivity of a typical diffraction grating. It shows the efficiency drop-off as the measurement wavelength moves away from the blazing point, as well as the divergence in s- and p-polarisation reflectivity curves.