Products
DEPOSITION TOOLSPlasma Enhanced Chemical Vapour Deposition (PECVD)Inductively Coupled Plasma Chemical Vapour Deposition (ICPCVD)Atomic Layer Deposition (ALD)Ion Beam Deposition (IBD)ETCH TOOLSInductively Coupled Plasma Etching (ICP RIE)Reactive Ion Etching (RIE)Deep Silicon Etching (DSiE)Atomic Layer Etching (ALE)Ion Beam Etching (IBE)
Learning
Figure 1. Typical indentation results for carbon rich and matrix regions of the sample.
Figure 2. Meso-scale Hardness map of a sample with site-specific properties, which is superimposed to the optical micrograph of the polished sample surface. The schematic at the bottom right corner illustrates the 3D design of the sample.