Products
DEPOSITION TOOLSPlasma Enhanced Chemical Vapour Deposition (PECVD)Inductively Coupled Plasma Chemical Vapour Deposition (ICPCVD)Atomic Layer Deposition (ALD)Ion Beam Deposition (IBD)ETCH TOOLSInductively Coupled Plasma Etching (ICP RIE)Reactive Ion Etching (RIE)Deep Silicon Etching (DSiE)Atomic Layer Etching (ALE)Ion Beam Etching (IBE)
Learning




where E is the Young’s modulus of the material, is the reduced modulus, and ν and νi are the Poisson’s ratio of the sample and the indenter tip, respectively. As Poisson’s ratios for the phases are available from DFT calculations [14], we have used these to subsequently determine the Young’s modulus of each phase from the measured values - Table 1.