Dr Sarah Riazimehr
Talk Title: A scalable PEALD platform for dielectric integration in 2D electronics
Date: 8th of October 2026 (Thursday), 11:30 am
In this presentation, Dr Sarah Riazimehr will discuss Oxford Instruments scalable PEALD approach for dielectric integration in 2D electronics, focusing on low-damage, in-situ surface preparation and controlled dielectric deposition on 2D materials. Our solutions aim to enable uniform, high-quality dielectric integration while preserving the delicate properties of 2D materials and supporting scalable device fabrication.
Dr Sarah Riazimehr is a Researcher in Residence at Oxford Instruments Plasma Technology, based at AMO GmbH in Germany. She contributes to Oxford Instruments Plasma Technology's experimental activities within the 2D Pilot Line (2DPL) project. Her work focuses on developing scalable, damage-free dielectric deposition processes for 2D materials using the Oxford Instruments Atomfab and PlasmaPro ASP ALD systems, as well as surface cleaning and preparation of 2D materials prior to dielectric deposition.