Join us for our webinar on Semiconductor Dielectric Material Preparation and Characterization. You'll hear from Oxford Instruments experts in Atomic Layer Deposition (ALD) and Atomic Force Microscopy (AFM), who will delve into obtaining information about the morphology, mechanical and electrical properties of samples. They will also demonstrate how the addition of nanoTDDB expands the electrical characterization capabilities of Jupiter XR AFM.
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DEPOSITION TOOLSPlasma Enhanced Chemical Vapour Deposition (PECVD)Chemical Vapour Deposition (CVD)Inductively Coupled Plasma Chemical Vapour Deposition (ICPCVD)Atomic Layer Deposition (ALD)Ion Beam Deposition (IBD)ETCH TOOLSInductively Coupled Plasma Etching (ICP RIE)Reactive Ion Etching (RIE)Deep Silicon Etching (DSiE)Atomic Layer Etching (ALE)Ion Beam Etching (IBE)
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