Oxford Instruments is a leading provider of advanced technologies and scientific instrumentation for the semiconductor industry, supporting customers from early-stage research and development through to high-volume manufacturing. Our solutions enable the development, characterisation, processing, inspection, and production of next-generation semiconductor devices and materials. By combining deep application expertise with proven manufacturing technologies, we help researchers accelerate innovation and manufacturers improve process performance, yield, and scalability across a broad range of semiconductor applications.

Plasma Technology's plasma etch and deposition, innovative atomic layer etch and deposition, and ion beam etch and deposition solutions enable the production of high-yield, efficient, and reliable advanced semiconductor devices. Our comprehensive portfolio spans research and development systems through to fully clusterable, robust, high-uptime production platforms designed for high-volume manufacturing. These solutions support innovation and scale-up across key markets including quantum technologies, power devices, augmented reality, and datacom.

Oxford Instruments also offers industry-leading materials characterization and failure analysis solutions that help customers accelerate technology development, improve yield, and ensure device reliability. Our analytical technologies, including EDS, EBSD, AFM, Raman microscopy, and metrology and inspection cameras, provide critical insights into material composition, crystal structure, layer quality, defects, contamination, and process-induced failures. Supporting applications from materials research and process qualification to production monitoring and root-cause analysis, these solutions enable confident decision-making throughout the semiconductor lifecycle, from fundamental research to volume production.

Visit the our booth to explore solutions that accelerate semiconductor innovation.

What's in the booth:

• ALE & ALD for HVM: Advanced atomic layer processing solutions for precise, scalable semiconductor manufacturing.
• Materials Characterisation & Failure Analysis: Explore EDS, EBSD, AFM, Raman microscopy, and an on-demand remote AFM demonstration of our Jupiter Discovery tool.
• Service & Support: Learn how our global service team helps maximize uptime, performance, and productivity.
• VR Experience: Experience the latest PTIQ software enhancements for Plasma Technology systems in an immersive VR environment.

For more details, visit Semicon West 2026.