Application
BioMEMS Fabrication

We’re using our key strengths in process development and technology in current MEMS applications spaces to facilitate new and emerging market applications in which we believe we can offer differentiated solutions. BioMEMS, or biomedical microelectromechanical systems, has emerged as a subset of MEMS devices for applications in biomedical research and medical microdevices. Our deposition and etching systems are ideal for the development, processing and fabrication of Immunoassay devices and lab-on-chip environments.

Video: BioMEMS Process Solutions

Plasma Process Solutions for BioMEMS Applications

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