Application

Automotive Sensors

MEMS fabrication, structural characterisation

MEMS is enabling a new generation of detectors allowing efficient measurement in for example motion sensing which is used in safety-critical systems as well as to enable autonomous vehicles. We provide processes and tools needed to manufacture advanced MEMS sensors as well as characterise them.

Process solutions for MEMS and Sensors

Plasma Process Solutions for Laser Applications Plasma Process Solutions for MEMS and Sensor Applications

Products

Ultimate spatial resolution and low energy performance for EDS in the SEM. Combining Extreme electronics and windowless construction with optimised geometry and sensor design delivers…

Ultim^® Extreme

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The FlexAL systems provide a new range of flexibility and capability in the engineering of nanoscale structures and devices by offering remote plasma atomic layer deposition (ALD)…

FlexAL

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Maximised large area etching and deposition production solutions

PlasmaPro 1000 PECVD

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Collecting good quality data is only the beginning of any complete EBSD analysis. AZtecICE provides all the necessary tools to process and interrogate your EBSD data and to solve…

AZtecICE: EBSD Data Processing Software

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AZtecTEM is an innovative EDS software specifically optimised for advanced TEM applications.

AZtecTEM is a unique system approach to the characterisation of materials at…

AZtecTEM

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LayerProbe is an exciting software tool for thin film analysis in the SEM. An option for the AZtec EDS microanalysis system, LayerProbe is faster, more cost-effective and higher…

AZtec LayerProbe

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INCAEnergy+ combines WDS and EDS to deliver the power of WDS sensitivity and resolution with EDS productivity and ease of use.

Wavelength Dispersive Spectroscopy (WDS) software,…

INCAEnergy+

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The Asylum Research MFP-3D-BIO sets the standard for integrating AFM and optical microscopy for bioscience research. It is the only bio-AFM that makes no compromises…

MFP-3D-BIO AFM

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The PlasmaPro 80 reactive ion etch (RIE) is a compact, small footprint system offering versatile etch and deposition solutions with convenient open loading. It is easy to site and…

PlasmaPro 80 RIE

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The PlasmaPro 100 Estrelas platform is designed to give total flexibility for Deep Silicon Etch (DSiE) applications - serving a diverse set of process requirements across the Micro…

PlasmaPro 100 Estrelas

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The X-Max^N Silicon Drift Detector large area sensor chips, digital signal processing, and innovative packaging deliver the highest sensitivity for accurate analysis of…

X-Max^N

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The industry-leading PORT MOUNTED nanomanipulators for FIB and SEM instruments include this model integrating 100nm closed-loop encoder feedback control for accuracy, flexibility…

OmniProbe 200

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A ninth generation of nanomanipulator, the OmniProbe 400 exploits innovative piezo actuation for best in class nanoscale positioning. Optimised for maximum flexibility and performance,…