Automotive Sensors

Related to: Automotive & Aerospace

MEMS fabrication, structural characterisation

MEMS is enabling a new generation of detectors allowing efficient measurement in for example motion sensing which is used in safety-critical systems as well as to enable autonomous vehicles. We provide processes and tools needed to manufacture advanced MEMS sensors as well as characterise them.

Process solutions for MEMS and Sensors


Plasma Process Solutions for Laser Applications Plasma Process Solutions for MEMS and Sensor Applications