| Tuesday 17 September 2019 | Wednesday 18 September 2019 | ||
| Dry Etching for MEMS Applications | Oxford Instruments |
Etching of InP & GaAs by Ion Beam Etching |
Oxford Instruments |
| Field Emission Scanning Probe Lithography & Cryogenic Plasma Etching for Beyond CMOS Devices | Martin Hofmann, TU Ilmenau | Investigation of the Transition Layer Properties of Plasma Oxidised SiC-SiO<sub>2</sub> stacks | Johannes Schalko, TU Wien - Gernot Fleckl, ISAS |
| Tuning Materials Properties in Plasma ALD by Substrate Biasing |
Dr Harm Knoops, Oxford Instruments |
End Point for Ion Beam Applications Including Etching of Magnetic Materials |
Oxford Instruments |
| Atomic Layer Etching (ALE) |
Oxford Instruments | Efficient Plasma Cleaning for PECVD | Oxford Instruments |
| SiC Etching for Via Holes & Feature for RF & Power Applications | Oxford Instruments | ZnO Optoelectronics using Plasma-based Processing | Borislav Hinkov, FKE und ZMNS, TU Wien |
| Graphene & 2D Materials-based Devices for Optoelectronics: CVD, ALD, RIE & ALE |
Oxford Instruments | Diamond Etching – Applications & Challenges |
Oxford Instruments |
| Review of InP etch process including End Point Detection and Plasma Clean Processes |
Oxford Instruments | GaN Low Damage Etch by ICP RIE & ALE |
Oxford Instruments |
| Plasma Deposition PECVD vs ICP PECVD | Oxford Instruments | Silicon Etching for Low Loss Integrated Photonics Components | Oxford Instruments |
| Review of AlGaAs/GaAs Processing for VCSEL Fabrication | Oxford Instruments | Double-metal Waveguide Fabrication for High Performance THz QCLs | Martin Kainz, u. ZMNS, TU Wien |
| Deep Etching of Interband Cascade Laser Ridge-Waveguides | Johannes Hillbrand, FKE und ZMNS , TU Wien | Fabrication of Biomedical Devices of On-chip Diagnostics & Life Sciences: An Overview of Relevant Plasma Processing Technology |
Oxford Instruments |
| Poster Session & Lab Tour |
Ion Beam Deposition of Nanolayers of VOx & other Materials by Ion Beam |
Oxford Instruments | |
| Conference Dinner |
Final Discussion | ||
Cost Per Person: Euro 240, for coffee / lunches during the workshop hours and one dinner on 17th of September
© Oxford Instruments 2019