May
9

CS Mantech 2022

We will be exhibiting at the International Conference on Compound Semiconductor Manufacturing Industry in Monterey, California, on 9 - 12 May 2022. The CS-MANTECH conference is the only conference dedicated to featuring manufacturing-focused presentations alongside state of the art compound materials challenges and industry-leading device performance demonstrations, all within a single venue.


Dr Katie Hore
Dr Katie Hore

During CS Mantech, Dr Katie Hore will be giving a talk on Wednesday 11th May 15:00 (PST).

Talk Title: Etching of GaAs/AlGaAs VCSEL Mesa
for High Volume Production

Abstract: This paper presents a high uniformity, low footing etch of GaAs/AlGaAs mesa on 150 mm wafers for VCSELs. The high uniformity means the process is suitable for fully automated optical endpointing techniques. Extended marathon tests have been performed to demonstrate the reliability and repeatability of the process necessary for high volume production.


Find out more: CS Mantech

We're looking forward to meeting you at the event and discussing your current work and workflows with you. If you would like to book a meeting with us at the show, please complete the form below.

Location

Monterey, CA

Date

May 9-12, 2022

Booth Number

64

Business

Plasma Technology

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