Meet Oxford Instruments at AVS ALD/ALE 2024

The AVS 24th International Conference on Atomic Layer Deposition (ALD 2024) featuring the 11th International Atomic Layer Etching Workshop (ALE 2024) will open its doors from 4th to 7th August 2024. This event dedicated to the science and technology of atomic layer controlled deposition of thin films and atomic layer etching will be a great opportunity to meet all professionals in this industry and share ideas and practices.

Oxford Instruments Plasma Technology team is looking forward to welcoming you to the event, to discuss your current projects and workflows. If you would like to book a meeting with us during the event, please complete the form below and visit our booth 17.

During the conference, Dr Ciaran Lennon and Dr Julian Michaels will be delivering talks on the subjects below.

For further information visit the AVS ALD/ALE 2024  webpage.

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Helsinki, Finland


4 - 7 August 2024




Plasma Technology

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Meet the Presenter

Dr Ciaran Lennon
Dr Ciaran Lennon

Dr Ciaran Lennon

Date: Wednesday, August 7, 2024, 4:30-4:45 pm (Room Hall 3D)

Title: Plasma-Enhanced Atomic Layer Deposition with RF Substrate Biasing to Tune the Performance of Superconducting Nanowire Single-Photon Detectors in the Mid-Infrared

Dr Ciaran Lennon is a Researcher in Residence with Oxford Instruments Plasma Technology based at The University of Glasgow, working on atomic-scale processing techniques (ALD and ALE), primarily concerning superconducting nitrides for quantum technology applications and semiconductor materials for power electronics applications. He completed a PhD at The University of Glasgow, as part of the EPSRC Centre for Doctoral Training in Intelligent Sensing and Measurement, working under the supervision of Prof. Robert Hadfield in the Quantum Sensors Group. His PhD was focused on the development of plasma-enhanced atomic layer deposition (PEALD) processes for superconducting metal nitrides and their application to superconducting nanowire single-photon detectors (SNSPDs). 

Dr Julian Michaels
Dr Julian Michaels

Dr Julian Michaels

Date: Wednesday, August 7, 2024, 9:30-9:45 am (Room Hall 3F)

Title: Atomic Layer Etching of Diamond for Epitaxy Preparation

Dr Julian Michaels received his PhD in Electrical and Computer Engineering from the University of Illinois at Urbana-Champaign in 2023. He is now a postdoctoral research scientist appointed there and reporting to Argonne National Laboratory as a visiting user. His work features innovations in the atomic layer etching aimed at improving smoothing capability and etch rate for quantum-relevant materials, such as diamond, SiC, and Nb.

Visit AVS ALD/ALE Program 2024

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