Oxford Instruments specialises in the design, manufacture and support of innovative solutions, tools and systems for the emerging nanotechnology markets in areas such as XRF (X-ray Fluorescence) analysers , microanalysis systems, superconducting wires, NMR (nuclear magnetic resonance) magnets, cryogenic systems, plasma etch and deposition low temperature environments and coating thickness measurement.

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INCADryCool™ - Liquid Nitrogen free EDS detector

INCADryCool-Liquid Nitrogen free EDS detector

INCADryCool : Liquid Nitrogen free EDS detector

A unique liquid nitrogen free EDS detector. 

With a performance guarantee in line with ISO 15632:2002.  Designed to meet the requirements of the semi-conductor industry, it surpasses all existing solutions for liquid nitrogen-free X-ray detection, offering both convenience and results you can rely on.

INCADryCool is cooled using a unique, patented, pulse tube cooling system, and integrate seamlessly with the INCAEnergy EDS platform.

Standard Features

  • Accurate and reliable detection of elements with performance guaranteed

  • Si(Li) crystal detection

  • Peak position and peak width do not change with count rate

  • Excellent sensitivity and resolution at low energy

  • Patented pulse tube cooler that cools the Si(Li) sensor package directly

  • No liquid nitrogen required for cooling

  • No floor standing compressors, chillers or other peripherals

  • Requires only electric supply

  • Motorised slide for easy detector retraction

  • Data is collected using INCAEnergy, the easy to use software platform that all manufacturers aspire to imitate

  • Semi S2-0703 Compliant


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