Cryopumps - Repair and Refurbish Services

Vacuum side: Complete disassembly, decontamination and clean all components

• Replace
• 15K condensing array (charcoal array)
• 80K condensing array (inlet array)
• Radiation shield
• Inspect and test the silicon diode or hydrogen vapor gauge and replace if required.
• Clean the vacuum vessel and coldhead cylinder prior to reassembly with indium gaskets.
• Upgrade to a new relief valve and install standpipe filter (reduces particulate on the relief valve).
• Leak check the vacuum vessel using a leak detector using helium mass spectrometer.
  

Helium circuit:

• Replace:
• Motor bearings, drive bearing, valve bearing, upper and lower bushings, Orings, inlet and exhaust valve bodies,
  first and second stage displacers and seals are all replaced with new
• Inspect and replace if necessary:
• scotch yoke, valve stems, rocker arms, crankshaft for damage and replace if necessary.
• Inspect & test motor and re-magnetize if necessary
• Set valve timing and test inlet valve seal