Oxford Instruments specialises in the design, manufacture and support of innovative solutions, tools and systems for the emerging nanotechnology markets in areas such as XRF (X-ray Fluorescence) analysers , microanalysis systems, superconducting wires, NMR (nuclear magnetic resonance) magnets, cryogenic systems, plasma etch and deposition low temperature environments and coating thickness measurement.

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Cryo-Plex 8LP (low profile)

Cryo-Plex 8LP (low profile) cryopump

Standard cryopump configuration for semiconductor tools the CryoPlex 8LP is ideal for space constrained applications requiring clean, oil free high vacuum pumping solutions.

Flexible Configurations

Standard cryopump inlet array configurations ANSI, ISO,Conflat ® and full UHV.

Flexible Configurations

Industry Standard Designs

Austin Scientific Cryo-Plex cryopumps and compressors are fully compatible and interchangeable with the Helix Cryotorr ® line of cryopumps and compressors making upgrades and repair exchanges seamless.

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