Please click here if you would like additional information
Cryo-Plex 8LP (low profile)
Standard cryopump configuration for semiconductor tools the CryoPlex 8LP is ideal for space constrained applications requiring clean, oil free high vacuum pumping solutions.
Flexible Configurations
Standard cryopump inlet array configurations ANSI, ISO,Conflat ® and full UHV.
Flexible Configurations
Industry Standard Designs
Austin Scientific Cryo-Plex cryopumps and compressors are fully compatible and interchangeable with the Helix Cryotorr ® line of cryopumps and compressors making upgrades and repair exchanges seamless.