Oxford Instruments specialises in the design, manufacture and support of innovative solutions, tools and systems for the emerging nanotechnology markets in areas such as XRF (X-ray Fluorescence) analysers , microanalysis systems, superconducting wires, NMR (nuclear magnetic resonance) magnets, cryogenic systems, plasma etch and deposition low temperature environments and coating thickness measurement.

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Plasma Technology

We offer flexible, configurable process tools and leading-edge processes for the precise, controllable and repeatable etching, deposition and growth of micro- and nano-structures.

Our systems provide process solutions for the micro- and nanometre engineering of materials for semiconductor, optoelectronics, MEMS & microfluidics, high quality optical coating and many other applications in micro- and nanotechnology. These solutions are based on core technologies in:

Products range from compact stand-alone systems for R&D, through batch tools and up to clustered cassette-to-cassette platforms for high-throughput production processing.

Situated 15 miles from the centre of Bristol, our site is a 10 minute drive from the M5 motorway Junction 20, a 20 minute drive from Bristol International Airport and a 5 minute walk from Yatton mainline railway station. You can download a PDF map and directions from Downloads and Links on the right.

Oxford Instruments Plasma Technology
North End
Yatton
Bristol BS49 4AP, UK
Tel +44 (0)1934 837000
Fax +44 (0)1934 837001
Email plasma.technology@oxinst.com

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