Please click here if you would like additional information
Plasma Technology
We offer flexible, configurable process tools and leading-edge processes for the precise, controllable and repeatable etching, deposition and growth of micro- and nano-structures.

Our systems provide process solutions for the micro- and nanometre engineering of materials for semiconductor, optoelectronics, MEMS & microfluidics, high quality optical coating and many other applications in micro- and nanotechnology. These solutions are based on core technologies in:
- Plasma Etch & Deposition
- Atomic Layer Deposition (ALD)
- Molecular Beam Epitaxy (MBE)
- Ion Beam Etch & Deposition
- Nanoscale Growth Systems
- Hydride Vapour Phase Epitaxy (HVPE)
Products range from compact stand-alone systems for R&D, through batch tools and up to clustered cassette-to-cassette platforms for high-throughput production processing.
Situated 15 miles from the centre of Bristol, our site is a 10 minute drive from the M5 motorway Junction 20, a 20 minute drive from Bristol International Airport and a 5 minute walk from Yatton mainline railway station. You can download a PDF map and directions from Downloads and Links on the right.
Oxford Instruments Plasma Technology
North End
Yatton
Bristol BS49 4AP, UK
Tel +44 (0)1934 837000
Fax +44 (0)1934 837001
Email plasma.technology@oxinst.com
Product finder
Additional Information
- Coating Thickness Measurement
- Austin Scientific -supply & repair of cryogenic vacuum pumps and helium compressors and cryogenic systems
- Magnets for NMR Spectroscopy
- NanoAnalysis : X-ray microanalysis systems for EDS, WDS, EBSD for SEM and TEM
- NanoScience -ultra low temperature and high magnetic field applications. Superconducting magnets, cryogenics, and cryogen free, cryostat dewars, cryogenic equipment, cryogenic products, liquid nitrogen, liquid helium.
- Industrial Analysis -elemental analysis and coating thickness measurement
- Molecular Biotools -benchtop NMR and DNP-NMR for industrial and bioscience applications
- Oxford Instruments plc
- Superconducting Technology -superconducting wire and cable
- X-ray Tubes and components
Related Information
Downloads and Links
Related Products
- ECellAs Arsenic cracker source
- FlexAL atomic layer deposition (ALD) tool
- Ionfab®300Plus
- Nanofab
- OpAL atomic layer deposition (ALD) tool
- Plasmalab®800Plus
- Plasmalab®80Plus
- Plasmalab®System100
- Plasmalab®System133
- Plasmalab®System400 magnetron sputter tool
- Plasmalab®µEtch300
- Plasmalab®µEtchEL
- TEOS PECVD module
- V100 molecular beam epitaxy (MBE) systems
- V80H molecular beam epitaxy (MBE) systems
- V90 molecular beam epitaxy (MBE) systems