FlexAL® Atomic Layer Deposition Tool - ALD Tool

Oxford Instruments’ FlexAL sytems provides a new range of flexibility and capability in the engineering of nanoscale structures and devices by offering remote plasma atomic layer deposition (ALD) processes and thermal ALD within a single ALD system to deliver:

Maximum flexibility in the choice of materials and precursors
Low-temperature processes enabled by plasma ALD
Low damage maintained by the use of remote plasma
Controllable, repeatable processes via recipe-driven software interface

Example ALD applications:

Nano-electronics
High-k gate oxides
Storage capacitor dielectrics
High aspect ratio diffusion barriers for Cu interconnects
Pinhole-free passivation layers for OLEDs and polymers
Passivation of crystal silicon solar cells
Highly conformal coatings for microfluidic and MEMS applications
Coating of nanoporous structures
Bio MEMS
Fuel cells

Images
Features
System Benefits
Precursor delivery
Support

FlexAL front view - click for larger image

Key Features

Remote plasma & thermal ALD in one flexible tool
Automated 200mm load lock for process flexibility
Clusterable for vacuum transfer of substrates
Cassette to cassette handling increases throughput suitable for production
Click right hand link to view our applicable processes

We work closely with our customers to develop new and customised processes according to their application needs; please contact us for details.

Feature	OpAL™	FlexAL ®
Substrates	Up to 200mm wafers & pieces directly on stage	Up to 200mm wafers handling and pieces on a carrier plate
Bubbled liquid & solid precursors	Up to 3	Up to 4
Max precursor source temperature	200ºC (Jacket)	200ºC (Oven & jacket)
Wafer delivery (inc source pot)	Included	Included
Mfc controlled gas lines with rapid delivery system; 1) thermal gas precursors (e.g. NH3, O2) 2) plasma gases (e.g. O2, N2, H2)	2 internally. Up to 8 in externally mounted gas pod	Up to 10 in externally mounted gas pod
Plasma	Option/field upgrade	Option
Loading	Open load	Loadlock or cassette
Clusterable to other process modules	No	Yes - inc third party MESC modules as special option
Wafer stage temperature range	25ºC – 400ºC	25ºC – 400ºC (550ºC option)
Ellipsometry ports	Yes	Yes
Swagelok 10ms rapid pulsing ALD valves	Yes	Yes

FlexAL System Benefits:

Ability to handle from small wafer pieces up to full 200 mm wafers
Load-locked wafer entry for safety, low particle count and short loading-to-process-start time
Unique precursor delivery system offering precise precursor temperature control with fan-assisted oven and optimised heated delivery lines
Integral glove box on precursor modules for in-situ change-over
Integral ports to allow the addition of in-situ ellipsometry measurement tools
Fits in compact space of less than 2 x 2 m even with maximum number of precursor modules
May be integrated in cluster system with other process tools, including Oxford Instruments PlasmalabSystem100 range of etch and deposition tools
Backed by Oxford Instruments' global sales and support network; with platform technology based on the popular PlasmalabSystem100 process tool, the FlexAL product family benefits from proven reliability in over 300 installed systems worldwide
Developed in consultation with leading atomic layer deposition (ALD) experts in Europe, Korea and USA
Licensed technology from ASM International NV

FlexAL wafer handling options:

Single wafer loadlock
Square handler clustered to other process modules, e.g. PlasmalabSystem400 sputter deposition
Hex handler with robot and 25 wafer cassette for 4”, 6” or 8” wafers (no tools required to swap between wafers)
All configurations can be located entirely within the cleanroom or through-the-wall

FlexAL Precursor Delivery:

Multiple liquid or solid precursor delivery systems
Vapour draw or bubbling up to 200ºC source temperature
Rapid gas delivery
Extracted precursor enclosures with attachable glove box for use during precursor changeover

- A Global Reach

Oxford Instruments is committed to supporting our customers’ success. We recognise that this requires world class products complemented by world class support. Our global service force is backed by regional offices, offering rapid support wherever you are in the world.

Service Centres*

Parts Centres

Europe & Middle East

Montevrain, France
Wiesbaden, Germany
Haifa, Israel
St Petersburg, Russia
Moscow, Russia
Bristol, UK

USA

Arizona, USA
Texas, USA
San Francisco, CA, USA
Concord, MA, USA

Asia

Beijing, China
Guangzhou, China
Shanghai, China
Hong Kong
New Delhi, India
Mumbai, India
Calcutta, India
Bangalore, India
Tokyo, Japan
Kyungki-do, Korea
Penang, Malaysia
Singapore
Taiwan County, Taiwan

Asia

Shanghai, China
Taiwan County, Taiwan

EMEA

Bristol, UK

USA

Concord, MA, USA

*Includes agents with OIPT trained engineers

For information on our Flexible Support Agreements please visit our Support pages

Please click here if you would like additional information or assistance