Cryogenic Vacuum Pumps

Cryoplex10 vacuum pump

We specialise in the manufacture and repair of cryogenic vacuum pumps, cryo-coolers (refrigerators) and helium compressors for semiconductor, optical coating, linear accelerators, medical equipment and R&D applications.

You can find just what you need from our range of products and support services.

  • New Equipment - cryopumps, compressors, and cryocoolers.
  • Refurbishment Services - a broad range of repair and refurbishment services - whatever brand of cryo-components you have, we offer fully warranted refurbishment, often with off-the-shelf availability.
  • Comprehensive range of accessories for the installation of whole systems and a complete range of spare parts to repair cryopumps and compressors.

Contact us with your enquiry:

Sales
4114 Todd Lane,
Austin, Texas 78744, USA.
Tel: +1-800-611-8871

512 441 6893 
Fax: +1 512 443 6665 
Email: cryo-sales@oxinst.com

 Support
4114 Todd Lane,
Austin, Texas 78744, USA.
Tel:+1-800-404-1055

512 441 6893 
Fax:+1 512 443 6665 
Email: cryo-support@oxinst.com

Choose a product
Cryo-Plex 10 Cryopump
 : Generally considered the most efficient cryopump design
Cryo-Plex 16 Cryopump
 : Standard cryopump in use on larger box-coating systems
Cryo-Plex 8 Cryopump
 : Standard cryopump for clean, oil free high vacuum pumping
Cryo-Plex 8LP Cryopump
 : Standard cryopump configuration for semiconductor tools
Contact Us

Please click here if you would like additional information or assistance

Online Quote Catalogue
Cryopump Catalogue
On-line catalogue offers an extensive range of cryogenic products, spare parts, accessories and consumables

Related Products

Downloads And Links
Austin brochure
Cryogenic Pumps and Compressors
Helium Compressors
Ultra high purity helium to single or multiple pumps
Support
Cryopump repair and refurbishment